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ID 30042
FullText URL
Author
Sano, Tetsuya
Nagahata, Hidekaz
Endo, Hiroshi
Sumimoto, Tetsuhiro
Kunishi, Takeshi
Yamamoto, Hideki
Abstract

A stereoscopic microscope is widely used in a micromanipulation such as to operate genes and to inspect integration circuits. As in these tasks the micromanipulation is handled and makes too heavy burden to operators, it is desirable to perform the micromanipulation automatically. In this paper, we propose a visual feedback system for micromanipulation with stereoscopic microscope. This system takes less time to control the manipulator by reducing searching area to detect an object

Keywords
CCD image sensors
automatic optical inspection
image processing equipment
integrated
circuit testing
manipulators
micromechanical devices
optical microscopes
robot vision
stereo image processing
Note
Digital Object Identifier: 10.1109/IMTC.1998.676899
Published with permission from the copyright holder. this is the institute's copy, as published in Instrumentation and Measurement Technology Conference, 1998. IMTC/98. Conference Proceedings. IEEE, 18-21 May 1998, Volume 2, Pages 1127-1132 vol.2 .
Publisher URL:http://dx.doi.org/10.1109/IMTC.1998.676899
Copyright © 1998 IEEE. All rights reserved.
Published Date
1998-5
Publication Title
Instrumentation and Measurement Technology Conference
Volume
volume2
Start Page
1127
End Page
1132
Content Type
Journal Article
language
English
Refereed
True
DOI
Submission Path
industrial_engineering/122