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ID 15503
Eprint ID
15503
FullText URL
Author
Mikuni, Masato
Hida, Moritaka
Nishida, Norihide
Sakakibara, Akira
Yamada, Masuo
Abstract
Strains induced in the Si substrates by TiN film were observed with X-ray topography. The image of the sample with TiN film 0.45μm thick was like that of a dislocation loop observed with transmission electron microscope. The images of the samples with TiN films 1.65, and 1.9μm thick were different; blackening spreaded in the <112> and <110> direction from the ring contrast in shape of four-lobed rosette pattern. Spreading extended 1.6 times longer than the radius of the ring contrast along the <112> direction. The strain field extended 0.1μm in depth from the top surface where TiN was plated. From the topographs of bent Si beam, it was found that the blackness was almost proportional to the strain. The strains induced by TiN film locally ion-plated were smaller than those observed previously when TiN was ion-plated on the whole top surface of the substrate. Fine structures were observed in the topographs which could not be explained by the kinematical theory.
Published Date
1991-03-28
Publication Title
Memoirs of the Faculty of Engineering, Okayama University
Publication Title Alternative
岡山大学工学部紀要
Volume
volume25
Issue
issue2
Publisher
Faculty of Engineering, Okayama University
Publisher Alternative
岡山大学工学部
Start Page
9
End Page
15
ISSN
0475-0071
NCID
AA10699856
Content Type
Departmental Bulletin Paper
language
英語
File Version
publisher
Refereed
False
Eprints Journal Name
mfe