Improvement of zone control induction heating equipment for high-speed processing of semiconductor

ID	34091
FullText URL	fulltext.pdf 223 KB
Author	Miyagi, Daisuke Saitoh, Aisya Takahashi, Norio Kaken ID publons researchmap Uchida, Naoki Ozaki, Kazuhiro
Abstract	In this paper, the effect of dividing into several small coil groups having different current and frequency on heating characteristics is investigated using FEM (finite element method). The heating characteristics of graphite of each coil is examined, and a useful information for controlling current and frequency, which realize the nearly uniform heating, is obtained.
Keywords	coils electric current control finite element analysis frequency control graphite induction heating semiconductor device manufacture
Note	Published with permission from the copyright holder. This is the institute's copy, as published in Magnetics Conference, 2005. INTERMAG Asia 2005. Digests of the IEEE International, 4-8 April 2005, Pages 1069-1070. Publisher URL:http://ieeexplore.ieee.org/search/wrapper.jsp?arnumber=1463964 Direct access to Thomson Web of Science record Copyright © 2005 IEEE. All rights reserved.
Published Date	2005-4
Publication Title	Magnetics Conference
Start Page	1069
End Page	1070
Content Type	Journal Article
language	English
Refereed	True
DOI	10.1109/intmag.2005.1463964
Web of Science KeyUT	000235266400005
Submission Path	electrical_engineering/101