Opacity effect on extreme ultraviolet radiation from laser-produced tin plasmas

Fujioka, Shinsuke; Nishimura, Hiroaki; Nishihara, Katsunobu; Sasaki, Akira; Sunahara, Atsushi; Okuno, Tomoharu; Ueda, Nobuyoshi; Ando, Tsuyoshi; Tao, Yezheng; Shimada, Yoshinori; Hashimoto, Kazuhisa; Yamaura, Michiteru; Shigemori, Keisuke; Nakai, Mitsuo; Nagai, Keiji; Norimatsu, Takayoshi; Nishikawa, Takeshi; Miyanaga, Noriaki; Izawa, Yasukazu; Mima, Kunioki

doi:10.1103/PhysRevLett.95.235004

Permalink : http://escholarship.lib.okayama-u.ac.jp/34161

ID	34161
フルテキストURL	fulltext.pdf 428 KB
著者	Fujioka, Shinsuke Osaka University Nishimura, Hiroaki Osaka University Nishihara, Katsunobu Osaka University Sasaki, Akira Advanced Photon Research Center Kaken ID publons researchmap Sunahara, Atsushi Institute for Laser Technology Okuno, Tomoharu Osaka University Ueda, Nobuyoshi Osaka University Ando, Tsuyoshi Osaka University Tao, Yezheng Osaka University Shimada, Yoshinori Institute for Laser Technology Hashimoto, Kazuhisa Institute for Laser Technology Yamaura, Michiteru Institute for Laser Technology Shigemori, Keisuke Osaka University Nakai, Mitsuo Osaka University Nagai, Keiji Osaka University Norimatsu, Takayoshi Osaka University Nishikawa, Takeshi Okayama University Kaken ID publons researchmap Miyanaga, Noriaki Osaka University Izawa, Yasukazu Osaka University Mima, Kunioki Osaka University
抄録	Opacity effects on extreme ultraviolet (EUV) emission from laser-produced tin (Sn) plasma have been experimentally investigated. An absorption spectrum of a uniform Sn plasma generated by thermal x rays has been measured in the EUV range (9-19 nm wavelength) for the first time. Experimental results indicate that control of the optical depth of the laser-produced Sn plasma is essential for obtaining high conversion to 13.5 nm-wavelength EUV radiation; 1.8% of the conversion efficiency was attained with the use of 2.2 ns laser pulses.
キーワード	emission targets lithography fusion
備考	Digital Object Identifer:10.1103/PhysRevLett.95.235004 Published with permission from the copyright holder. This is the institute's copy, as published in Physical Review Letters, November 2005, Volume 95, Issue 23, Pages 4. Publisher URL:http://dx.doi.org/10.1103/PhysRevLett.95.235004 Direct access to Thomson Web of Science record Copyright © 2005 The American Physical Society. All rights reserved.
発行日	2005-11
出版物タイトル	Physical Review Letters
巻	95巻
号	23号
資料タイプ	学術雑誌論文
言語	英語
査読	有り
DOI	10.1103/PhysRevLett.95.235004
Web of Science KeyUT	000233724000038
Submission Path	physics_general/19