ID | 15453 |
JaLCDOI | |
Sort Key | 3
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フルテキストURL | |
著者 |
Kusumoto, Hisao
Department of Mechanical Engineering
飛田 守孝
Department of Mechanical Engineering
榊原 精
Department of Mechanical Engineering
Nishida, Norihide
Industrial Technical Center of Okayama Prefecture
山田 益男
Department of Mechanical Engineering
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抄録 | The strain in Si substrate induced by locally ion-plated thin film of TiN was observed by X-ray topograph (Lang technique). Circular TiN film was deposited on one side of the Si surface. In all topographs the highest blackness attributed to kinematical diffraction effect occurred at the film edge. Rosette pattern with four-lobes was observed around the film. Blackness as a whole increased with the film thickness. Strain was observed in the depth direction of substrate by limited projection method. When the slit width was narrowed, the kinematical images disappeared, and white images appeared at the film edge. All the contrast disappeared when the TiN film was completely removed in boiling HNO(3). The strain induced by the film deposition was proved to be elastic.
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出版物タイトル |
Memoirs of the Faculty of Engineering, Okayama University
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発行日 | 1994-03-15
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巻 | 28巻
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号 | 2号
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出版者 | Faculty of Engineering, Okayama University
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出版者(別表記) | 岡山大学工学部
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開始ページ | 13
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終了ページ | 20
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ISSN | 0475-0071
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NCID | AA10699856
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資料タイプ |
紀要論文
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OAI-PMH Set |
岡山大学
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言語 |
英語
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論文のバージョン | publisher
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NAID | |
Eprints Journal Name | mfe
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