ID | 15402 |
JaLCDOI | |
Sort Key | 5
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フルテキストURL | |
著者 |
東辻 浩夫
Department of Electrical and Electronic Engineering
岸本 篤也
Department of Electrical and Electronic Engineering
東辻 千枝子
Department of Electrical and Electronic Engineering
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抄録 | The behavior of the Yukawa system in external one-dimensional force fields is analyzed by the molecular dynamics simulation. The formation of layered structures at low temperatures is observed and the relation between the number of layers and characteristic parameters of the system is obtained. Since the Yukawa system serves as a model of clouds of dust particles in plasmas (dusty plasma) which play an important role in plasma processes of semiconductor engineering, the results may be useful to control the quality of semiconductor wafers in such processes. In simulations, periodic boundary conditions are
imposed in two dimensions and deformations of periodic boundaries are allowed in order to reduce the effect of boundaries without giving too much constraint on the symmetry.
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出版物タイトル |
Memoirs of the Faculty of Engineering, Okayama University
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発行日 | 1996-03-29
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巻 | 30巻
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号 | 2号
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出版者 | Faculty of Engineering, Okayama University
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出版者(別表記) | 岡山大学工学部
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開始ページ | 27
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終了ページ | 37
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ISSN | 0475-0071
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NCID | AA10699856
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資料タイプ |
紀要論文
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OAI-PMH Set |
岡山大学
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言語 |
英語
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論文のバージョン | publisher
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NAID | |
Eprints Journal Name | mfe
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