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ID 56138
タイトル(別表記)
Large-scale vortical structure detection using microphone array in a semiconductor single wafer spin cleaner
フルテキストURL
著者
河内 俊憲 岡山大学大学院 自然科学研究科
三好 勇輝 岡山大学大学院 自然科学研究科
中野 裕介 岡山大学大学院 自然科学研究科
永田 靖典 岡山大学大学院 自然科学研究科
柳瀬 眞一郎 岡山大学大学院 自然科学研究科
抄録
Fluctuating pressure (p’ ) of a large-scale vortical structure generated in a semiconductor single wafer spin cleaner was detected by using microphone array. Twelve microphones were installed on the exhaust cover under the rotating disk of the cleaner with their interval of 7.5° or 15°. Power spectrum densities (PSD) of p’ were compared with those of fluctuating velocity measured by PIV for various rotation angular velocities to identify fluctuations due to convection of the large-scale vortical structure. Good agreement of PSDs indicates that the large-scale structure could be detected by using microphone. Cross-correlation of p’ measured at different positions revealed that the large-scale structure convected to the downstream in the rotational direction of the disk. The convection speed was about 12 % of the angular velocity of the rotating disk. Number of the vortex in the large-scale structure was also evaluated from the time-series p’ data. Time-space contour map was made for p’ based on the data measured at the different angular position, and showed periodical swept strip patterns. Presences of the strip patterns indicate the pressure disturbances were stably convected to the downstream. From this time-space map, two-dimensional Fourier transform efficiently extracted the number of vortices in the large-scale structure.
キーワード
Rotating disk
Flow stability
Coherent structure
Differential pressure measurement
発行日
2017
出版物タイトル
日本機械学会論文集
83巻
845号
出版者
日本機械学会
開始ページ
16-00441
ISSN
00290270
NCID
AN00187419
資料タイプ
学術雑誌論文
言語
Japanese
OAI-PMH Set
岡山大学
著作権者
© 2016 The Japan Society of Mechanical Engineers
論文のバージョン
author
NAID
DOI
関連URL
isVersionOf https://doi.org/10.1299/transjsme.16-00441