Auto Guided Vehicles (AGVs) are widely used in a semi-conductor fabricating factory and contribute to the stable production of a high quality semi-conductor products. In the near future, further expansion of the transportation system is expected accompanied with the rapid growth of semi-conductor industries. In such situation, the necessity of performing quick planning of transportation route and transportation control will be elevated. In this paper, practicable planning of the transportation route and transportation control are studied based on the decentralized agent method. Especially, the geometrical sizes of AGVs are considered in the determination of transportation routes and control strategy avoiding the occurrence of mutual collisions or deadlock of AGVs.