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ID 19584
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Author
Uno, Yoshiyuki
Kubota, Shin-ichiro
Yokomizo, Seiichi
Ogata, Kojiro
Tada, Nobuhiko
Abstract
Scribing of copper coated alumina ceramic board with Q-switched YAG laser used for the maskless direct patterning of circuit board is experimentally investigated, which leads to efficient production of trial circuit board. Better dividing of alumina circuit board 655μm in thickness can be attained by the scribing of about 100μm depth. Higher repetition frequency of laser irradiation leads to smaller notch angle and lower breaking load.
Publication Title
Memoirs of the Faculty of Engineering, Okayama University
Published Date
1994-11-30
Volume
volume29
Issue
issue1
Publisher
Faculty of Engineering, Okayama University
Publisher Alternative
岡山大学工学部
Start Page
1
End Page
6
ISSN
0475-0071
NCID
AA10699856
Content Type
Departmental Bulletin Paper
OAI-PMH Set
岡山大学
language
English
File Version
publisher
NAID
Eprints Journal Name
mfe