start-ver=1.4 cd-journal=joma no-vol=18 cd-vols= no-issue=6 article-no= start-page=879 end-page=884 dt-received= dt-revised= dt-accepted= dt-pub-year=2011 dt-pub=201111 dt-online= en-article= kn-article= en-subject= kn-subject= en-title= kn-title=Development of a soft X-ray angle-resolved photoemission system applicable to 100 µm crystals en-subtitle= kn-subtitle= en-abstract= kn-abstract=A system for angle-resolved photoemission spectroscopy (ARPES) of small single crystals with sizes down to 100 µm has been developed. Soft X-ray synchrotron radiation with a spot size of ~40 µm × 65 µm at the sample position is used for the excitation. Using this system an ARPES measurement has been performed on a Si crystal of size 120 µm × 100 µm × 80 µm. The crystal was properly oriented on a sample stage by measuring the Laue spots. The crystal was cleaved in situ with a microcleaver at 100 K. The cleaved surface was adjusted to the beam spot using an optical microscope. Consequently, clear band dispersions along the Γ-X direction reflecting the bulk electronic states were observed with a photon energy of 879 eV. en-copyright= kn-copyright= en-aut-name=MuroTakayuki en-aut-sei=Muro en-aut-mei=Takayuki kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=1 ORCID= en-aut-name=Katoyukako en-aut-sei=Kato en-aut-mei=yukako kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=2 ORCID= en-aut-name=MatsushitaTomohiro en-aut-sei=Matsushita en-aut-mei=Tomohiro kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=3 ORCID= en-aut-name=KinoshitaToyohiko en-aut-sei=Kinoshita en-aut-mei=Toyohiko kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=4 ORCID= en-aut-name=WatanabeYoshio en-aut-sei=Watanabe en-aut-mei=Yoshio kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=5 ORCID= en-aut-name=OkazakiHiroyuki en-aut-sei=Okazaki en-aut-mei=Hiroyuki kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=6 ORCID= en-aut-name=YokoyaTakayoshi en-aut-sei=Yokoya en-aut-mei=Takayoshi kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=7 ORCID= en-aut-name=SekiyamaAkira en-aut-sei=Sekiyama en-aut-mei=Akira kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=8 ORCID= en-aut-name=Sugahigemasa en-aut-sei=Suga en-aut-mei=higemasa kn-aut-name= kn-aut-sei= kn-aut-mei= aut-affil-num=9 ORCID= affil-num=1 en-affil= kn-affil=Japan Synchrotron Radiation Research Institute (JASRI) affil-num=2 en-affil= kn-affil=Japan Synchrotron Radiation Research Institute (JASRI) affil-num=3 en-affil= kn-affil=Japan Synchrotron Radiation Research Institute (JASRI) affil-num=4 en-affil= kn-affil=Japan Synchrotron Radiation Research Institute (JASRI) affil-num=5 en-affil= kn-affil=Japan Synchrotron Radiation Research Institute (JASRI) affil-num=6 en-affil= kn-affil=The Graduate School of Natural Science and Technology, Okayama University affil-num=7 en-affil= kn-affil=The Graduate School of Natural Science and Technology, Okayama University affil-num=8 en-affil= kn-affil=Graduate School of Engineering Science, Osaka University affil-num=9 en-affil= kn-affil=Graduate School of Engineering Science, Osaka University en-keyword=angle-resolved photoemission spectroscopy (ARPES) kn-keyword=angle-resolved photoemission spectroscopy (ARPES) en-keyword=soft X-ray kn-keyword=soft X-ray en-keyword=small crystal kn-keyword=small crystal en-keyword=microcleaving kn-keyword=microcleaving en-keyword=micropositioning kn-keyword=micropositioning END