start-ver=1.4
cd-journal=joma
no-vol=34
cd-vols=
no-issue=4
article-no=
start-page=845
end-page=848
dt-received=
dt-revised=
dt-accepted=
dt-pub-year=2008
dt-pub=200805
dt-online=
en-article=
kn-article=
en-subject=
kn-subject=
en-title=
kn-title=Improvement of piezoresistance properties of silicon carbide ceramics through co-doping of aluminum nitride and nitrogen
en-subtitle=
kn-subtitle=
en-abstract=
kn-abstract=The piezoresistance coefficient was measured on co-doped silicon carbide ceramics. Evaluation samples of alpha-silicon carbide ceramics were first fabricated by glass capsule HIP method using powder mixture of silicon carbide and aluminum nitride with various ratios. The resultant aluminum nitride added silicon carbide ceramics were doped with nitrogen by changing the post-HIP nitrogen gas pressure. The lattice parameter increased with the amount of adding aluminum nitride indicating that the incorporated aluminum substituted smaller silicon atoms. After post-HIP treatment, lattice parameter then decreased with nitrogen gas pressure. The piezoresistive coefficient increased with the addition of aluminum nitride, it further increased with the nitrogen doping pressure.
en-copyright=
kn-copyright=

en-aut-name=KishimotoAkira
en-aut-sei=Kishimoto
en-aut-mei=Akira
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=1
ORCID=

en-aut-name=OkadaYasuyuki
en-aut-sei=Okada
en-aut-mei=Yasuyuki
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=2
ORCID=

en-aut-name=HayashiHidetaka
en-aut-sei=Hayashi
en-aut-mei=Hidetaka
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=3
ORCID=

affil-num=1
en-affil=
kn-affil=Division of Chemistry and Biochemistry, Graduate School of Natural Science and Technology, Okayama University

affil-num=2
en-affil=
kn-affil=Division of Chemistry and Biochemistry, Graduate School of Natural Science and Technology, Okayama University

affil-num=3
en-affil=
kn-affil=Division of Chemistry and Biochemistry, Graduate School of Natural Science and Technology, Okayama University
en-keyword=HIP
kn-keyword=HIP
en-keyword=co-doping
kn-keyword=co-doping
en-keyword=donor
kn-keyword=donor
en-keyword=acceptor
kn-keyword=acceptor
en-keyword=silicon carbide
kn-keyword=silicon carbide
en-keyword=strain sensor
kn-keyword=strain sensor
END