start-ver=1.4
cd-journal=joma
no-vol=68
cd-vols=
no-issue=1
article-no=
start-page=197
end-page=200
dt-received=
dt-revised=
dt-accepted=
dt-pub-year=2019
dt-pub=20191231
dt-online=
en-article=
kn-article=
en-subject=
kn-subject=
en-title=
kn-title=High surface quality micro machining of monocrystalline diamond by picosecond pulsed laser
en-subtitle=
kn-subtitle=
en-abstract=
kn-abstract=In micro machining of monocrystalline diamond by pulsed laser, unique processing characteristics appeared only under a few ten picosecond pulse duration and a certain overlap rate of laser shot. Cracks mostly propagate in parallel direction to top surface of workpiece, although the laser beam axis is perpendicular to the surface. This processed area can keep diamond structure, and its surface roughness is smaller than R-a = 0.2 mu M. New laser micro machining method to keep diamond structure and small surface roughness is proposed. This method can contribute to reduce the polishing process in micro machining of diamond. (C) 2019 Published by Elsevier Ltd on behalf of CIRP.
en-copyright=
kn-copyright=

en-aut-name=OkamotoY.
en-aut-sei=Okamoto
en-aut-mei=Y.
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=1
ORCID=

en-aut-name=OkadaA.
en-aut-sei=Okada
en-aut-mei=A.
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=2
ORCID=

en-aut-name=KajitaniA.
en-aut-sei=Kajitani
en-aut-mei=A.
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=3
ORCID=

en-aut-name=ShinonagaT.
en-aut-sei=Shinonaga
en-aut-mei=T.
kn-aut-name=
kn-aut-sei=
kn-aut-mei=
aut-affil-num=4
ORCID=

affil-num=1
en-affil=Graduate School of Natural Science & Technology, Okayama University
kn-affil=

affil-num=2
en-affil=Graduate School of Natural Science & Technology, Okayama University
kn-affil=

affil-num=3
en-affil=Graduate School of Natural Science & Technology, Okayama University
kn-affil=

affil-num=4
en-affil=Graduate School of Natural Science & Technology, Okayama University
kn-affil=
en-keyword=Laser beam machining (LBM)
kn-keyword=Laser beam machining (LBM)
en-keyword=Laser micro machining
kn-keyword=Laser micro machining
en-keyword=Diamond
kn-keyword=Diamond
END